MDHYDS6H 6inch Dicing Saw for Semiconductor Industry
Application:
IC,Optical,communication,LED,MEMS,Medical,NTC,Quartz,Diode,Triode etc.
Material suitable: Si,GaAsLiNbO3,Al2O3,Ceramic,Glass,Quartz,PCB,EMC etc.
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MDHYDS6L |
MDHYDS6M |
MDHYDS6H |
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Spec |
dicing size |
mm |
ф6”〡□150 |
ф6”〡□150 |
ф6”〡□150 |
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dicing depth |
mm |
≤4mm or custom |
≤4mm or custom |
≤4mm or custom |
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Main spindle |
rotaty speed |
minˉ¹ |
3000∽40000 |
10000∽50000 |
10000∽50000 |
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power |
kW |
AC,1.25at40000minˉ¹ |
AC,1.5at50000minˉ¹ |
DC,1.5at50000minˉ¹ |
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X axis |
stroke |
mm |
250 |
250 |
250 |
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speed range |
mm/s |
0.1∽400 |
0.1∽400 |
0.1∽500 |
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Y axis |
stroke |
mm |
170 |
170 |
170 |
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resolution |
mm |
0.0001 |
0.0001 |
0.0001 |
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|
single move accuracy |
mm |
≤0.003/5 |
≤0.003/5 |
≤0.002/5 |
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F accuracy |
mm |
≤0.005/170 |
≤0.005/170 |
≤0.004/170 |
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Z axis |
stroke |
mm |
30 |
30 |
30 |
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max blade size: |
mm |
ф58 |
ф58 |
ф58 |
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resolution |
mm |
0.0001 |
0.0001 |
0.0001 |
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accuracy |
mm |
0.001 |
0.001 |
0.001 |
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R axis |
rotary range |
deg |
380 |
380 |
380 |
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Basic required |
power |
KVA |
3.0（single phase，AC220V） |
3.0（single phase，AC220V） |
3.0（single phase，AC220V） |
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air |
Mpa L/min |
0.5∽0.6max consumption180 |
0.5∽0.6max consumption200 |
0.5∽0.6max consumption200 |
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|
cutting fluid |
Mpa L/min |
0.2∽0.3max consumption3.0 |
0.2∽0.3max consumption3.5 |
0.2∽0.3max consumption3.5 |
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cooling water |
Mpa L/min |
0.2∽0.3max consumption1.5 |
0.2∽0.3max consumption1.5 |
0.2∽0.3max consumption1.5 |
