SPMV-100HT Vacuum Microwave Plasma Cleaning Machine
Summary:
Microwave plasma cleaning machine, SPMV-100H is a low-pressure microwave plasma cleaning system, which is used for surface pretreatment before SMT, wire bonding, packaging and other processes. The freely moving electrons generate Plasma and enter the magazine where the cavity is located for process cleaning. A large amount of sustained plasma can be generated by applying microwaves at a frequency of 2.45 GHz to a window in the wall of the vacuum cavity. The cavity is suitable for different size cartridges.SPMV-100H can provide fast non-destructive plasma cleaning effect. The plasma cleaning effect of the system is achieved by the generation of activated free radicals through the cartridge.
Features:
The product placement fixture is flexible and can adapt to irregular products
Electrodeless microwave design can meet the processing needs of soft products.
No UV radiation
Low temperature plasma to avoid thermal damage to the product
Electrically neutral plasma, no electrical damage to products
Equipped with magnetic fluid rotating frame to increase the uniformity of Plasma treatment
Efficient and uniform microwave plasma output to ensure etching efficiency
Industry application:
PCB/FPC industry: hole drilling and surface cleaning, coverlay surface roughening and cleaning
Semiconductor industry: semiconductor packaging, camera modules, LED packaging, BGA packaging, Wire Bond pretreatment
Ceramic: packaging, pre-dispensing treatment
Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon wafer PN junction removal, ITO film etching
Plastic materials: Teflon Teflon surface activation, ABS surface activation, and other plastic materials cleaning activation
Surface cleaning before ITO coating
Equipment Specification:
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Power Systems |
Power Type |
Microwave power |
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Power |
0~1250W |
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Frequency |
2.45GHz |
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Vacuum System |
Two-stage rotary vane pump (oil pump) |
60m3/h（Optional dry pump） |
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Vacuum line |
All stainless steel pipes, and high-strength vacuum bellows |
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Material |
Aluminum alloy (customized stainless steel cavity) |
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Thickness |
25mm |
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Tightness |
Military grade welded seal |
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Inner Chamber size |
450×450×450mm（W×H×D） |
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Workspace |
6 magazine sections |
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ECR |
Slotted Magazine and provides ECR enhanced treatment |
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Tray rotation |
Magnetic fluid control tray rotation |
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Gas system |
Flow range |
0~300SCCM |
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Process gas circuit |
Standard two-way CF4 gas optional |
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Control System |
System control |
PLC |
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Interactive mode |
7 inch touch screen |
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Other specification |
Machine size |
1300×2100×1200mm（W×H×D） |
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Weight |
250KG |
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Color |
Silver grey |
Factory specifications require
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AC Power Specifications |
Power supply：AC380V，50/60Hz，5-wire，50A |
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Factory exhaust |
Flow ：2.0 m³/min |
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Factory working gas requirements |
Flow：1~10 L/min Pressure ：3~7 kg/cm² Pipe diameter ：6×4 mm Material ：PU tube purity ：99.99% above |
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Factory compressed air requirements |
Flow：1~10 L/min Pressure ：3~7 kg/cm² Pipe diameter ：8×5 mm Material ：PU tube dew point ：-40℃below Particle＞0.3μm：10Pcs/ft³ |
General Specifications:
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Danger signs |
High Voltage Hazard Sign |
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Use environment |
Temperature ：15~30℃ Humidity ：30~70% |
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Other considerations |
No flammable gas, corrosive gas, explosive or reactive dust Cylinders need to be fixed |
Quality assurance and after-sales service:
1、The warranty period is 1 year. During the warranty period, damaged parts shall be replaced free of charge under normal use
2、If the operation is within the safety range that the equipment cannot meet, resulting in the damage of relevant parts, our company will not be liable for compensation
3、In case of equipment damage caused by force majeure disasters such as earthquake, fire, typhoon and tsunami, our company is not responsible for compensation
4、Our company will not be liable for any direct or indirect damage to the equipment caused by non use of original parts
5、If the equipment is damaged or defective due to improper design, our company will replace the defective or damaged parts free of charge
6、After the warranty period, your company shall be responsible for the consumables and service costs required for replacing parts.
