MD-5L MD-10L Desktop Vacuum Plasma Cleaning Machine

MD-5L Desktop Vacuum Plasma Cleaning Machine

1、 Equipment Description: Part of the plasma power supply, vacuum system, inflation system,

automatic control system.The basic principle of work is that under vacuum, the plasma can

ionize the gas under the control and qualitative methods, and the vacuum pump is used to

vacuum the working chamber to a vacuum of 30-40 Pa, and then the gas is ionized under the

action of the high frequency generator. Forming a plasma (the fourth state of matter), its

remarkable feature is a high uniform knife glow discharge, which emits color visible light from

blue to deep purple according to different gases, and the material processing temperature is

close to room temperature.These highly active microparticles interact with the treated surface

to provide various surface characteristics such as surface hydrophilicity, water repellency, low

friction, high cleaning, activation, and etching.

2、 plasma processing advantages:

1. Environmental protection technology: The plasma action process is a gas-solid phase dry reaction,

which does not consume water resources, does not require the addition of chemicals, and has no

pollution to the environment.

2. Wide applicability: It can be processed regardless of the type of substrate to be processed, such as

metals, semiconductors, oxides and most polymer materials.

3. Low temperature: close to normal temperature, especially suitable for polymer materials, longer

storage time and higher surface tension than corona and flame methods.

4. Strong function: only involves the shallow surface of polymer material (10 -1000A), which can give

it one or more new functions while maintaining its own characteristics;

5.Low cost: simple installation, easy operation and maintenance, continuous operation, often several

bottles of gas can replace thousands of kilograms of cleaning fluid, so the cleaning cost will be

much lower than wet cleaning.

6. Full process controllable process: All parameters can be set by computer and data recording for

process quality control.

7. The geometry of the treatment is unlimited: large or small, simple or complex, and parts or textilescan be processed.

Model：MD-5L

A small plasma cleaner refers to a plasma cleaner with a volume below 10 liters and

a radio frequency power supply below 500 watts. According to different cleaning and

processing requirements, the frequency is divided into 40KHz, 13.56MHz and

2.54GHz. In comparison, when operating at 13.56MHz RF frequency, the matching is

simple, and the RF power supply provided is highly efficient, so it is popular in

conventional material handling and cleaning applications

General technical parameters of the equipment

____ Type 5L is a dual gas input.

*Cavity material： Stainless steel surface treatment

*Power supply： AC220V

*Working current： The working current of the whole machine is not

more than 1.2A (excluding vacuum pump)

*RF power supply： 0-300W Adjustable

*RF frequency： 40KHZ

*Frequency offset： ＜ 0.2KHz

*Characteristic impedance： 50 ohm, automatic matching

*Vacuum degree： 1pa-30Pa

*Number of gas paths： Dual gas input

*Gas flow： 10—100ml/min(Adjustable)

*Process control： PLC operation interface automatic and manual mode

Cleaning time： 1-6000s(Adjustable)

Power size: 10%-100%(Adjustable)

Inner cavity size: L×W:150*270mm

*Dimension： _510x450x420 mm

*Weight： 45Kg

*Vacuum pump： 2XZ-4

*Vacuum chamber temperature： ＜ 65°C

*Cooling method： Forced air cooling